Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159608 | Method for forming TiSiN thin film layer by using atomic layer deposition | Young Jin Jang, Gi Youl Kim, Brian Lu, Greg Siu, Hugo Silva +1 more | 2015-10-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159608 | Method for forming TiSiN thin film layer by using atomic layer deposition | Young Jin Jang, Gi Youl Kim, Brian Lu, Greg Siu, Hugo Silva +1 more | 2015-10-13 |