GS

Greg Siu

AS Aixtron Se: 1 patents #40 of 116Top 35%
Overall (All Time): #3,074,896 of 4,157,543Top 75%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9159608 Method for forming TiSiN thin film layer by using atomic layer deposition Woong Park, Young Jin Jang, Gi Youl Kim, Brian Lu, Hugo Silva +1 more 2015-10-13