Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767592 | Gas-dispersing apparatus for multiple chemical resources | Huaqiang Tan, Zhuo Wang, Xin Su | 2023-09-26 |
| 9159608 | Method for forming TiSiN thin film layer by using atomic layer deposition | Woong Park, Young Jin Jang, Brian Lu, Greg Siu, Hugo Silva +1 more | 2015-10-13 |
| 7981473 | Transient enhanced atomic layer deposition | Anuranjan Srivastava, Thomas E. Seidel, Ana R. Londergan, Sasangan Ramanathan | 2011-07-19 |