Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1018756 | Rifle | — | 2024-03-19 |
| 10996562 | Method and structure for nanoimprint lithography masks using optical film coatings | — | 2021-05-04 |
| 10923359 | Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfaces | Michael I. Current | 2021-02-16 |
| 10896823 | Limited dose atomic layer processes for localizing coatings on non-planar surfaces | Michael I. Current | 2021-01-19 |
| 10156786 | Method and structure for nanoimprint lithography masks using optical film coatings | — | 2018-12-18 |
| 9311234 | Method for reliably addressing a large flash memory and flash memory | Martin Roeder | 2016-04-12 |
| 9246042 | Method for contacting and connecting solar cells | Matthias Schaarschmidt, Thilo Richter, Wolfgang Enger, Paul Grunow, Martin Kutzer +3 more | 2016-01-26 |
| 7981473 | Transient enhanced atomic layer deposition | Gi Youl Kim, Anuranjan Srivastava, Ana R. Londergan, Sasangan Ramanathan | 2011-07-19 |
| 7183649 | Methods and procedures for engineering of composite conductive films by atomic layer deposition | Ana R. Londergan | 2007-02-27 |
| 7164203 | Methods and procedures for engineering of composite conductive by atomic layer deposition | Ana R. Londergan | 2007-01-16 |
| 7129580 | Methods and procedures for engineering of composite conductive films by atomic layer deposition | Ana R. Londergan | 2006-10-31 |
| 6905547 | Method and apparatus for flexible atomic layer deposition | Ana R. Londergan, Lawrence D. Matthysse, Ed C. Lee | 2005-06-14 |
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Adrian Jansz, Jurek Puchacz, Ken Doering | 2005-06-07 |
| 6897119 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Carl Galewski | 2005-05-24 |
| 6720259 | Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition | Ana R. Londergan, Sasangan Ramanathan, Jereld Lee Winkler | 2004-04-13 |
| 6638859 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Carl Galewski | 2003-10-28 |
| 6635570 | PECVD and CVD processes for WNx deposition | Carl Galewski, Claude A. Sands, Hector Velasco, Lawrence D. Matthysse | 2003-10-21 |
| 6551399 | Fully integrated process for MIM capacitors using atomic layer deposition | Ofer Sneh | 2003-04-22 |
| 6502605 | Process for the production of a face-to-face carpet fabric | Rainer Goessl | 2003-01-07 |
| 6503330 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Carl Galewski | 2003-01-07 |
| 6387185 | Processing chamber for atomic layer deposition processes | Kenneth Brian Doering, Carl Galewski, Prasad N. Gadgil | 2002-05-14 |
| 6174377 | Processing chamber for atomic layer deposition processes | Kenneth Brian Doering, Carl Galewski, Prasad N. Gadgil | 2001-01-16 |
| 6100184 | Method of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer | Bin Zhao, Prahalad K. Vasudev, Ronald S. Horwath, Peter M. Zeitzoff | 2000-08-08 |
| 6037664 | Dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer | Bin Zhao, Prahalad K. Vasudev, Ronald S. Horwath, Peter M. Zeitzoff | 2000-03-14 |
| 5879459 | Vertically-stacked process reactor and cluster tool system for atomic layer deposition | Prasad N. Gadgil | 1999-03-09 |