Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Thomas E. Seidel, Jurek Puchacz, Ken Doering | 2005-06-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Thomas E. Seidel, Jurek Puchacz, Ken Doering | 2005-06-07 |