Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7015426 | Purged heater-susceptor for an ALD/CVD reactor | Mike Kubani, Gi Kim, David Foote | 2006-03-21 |
| 6902624 | Massively parallel atomic layer deposition/chemical vapor deposition system | Thomas E. Seidel, Adrian Jansz, Jurek Puchacz | 2005-06-07 |