Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905547 | Method and apparatus for flexible atomic layer deposition | Ana R. Londergan, Thomas E. Seidel, Ed C. Lee | 2005-06-14 |
| 6635570 | PECVD and CVD processes for WNx deposition | Carl Galewski, Claude A. Sands, Hector Velasco, Thomas E. Seidel | 2003-10-21 |