Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Transient enhanced atomic layer deposition

Transient enhanced atomic layer deposition

US Patent 7981473 · Granted Jul 19, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Angular and linear movement detection and compensation for user equipment2025
Rifle2024
Gas-dispersing apparatus for multiple chemical resources2023
Method and structure for nanoimprint lithography masks using optical film coatin2021
Limited dose and angle directed beam assisted ALE and ALD processes for localize2021
Limited dose atomic layer processes for localizing coatings on non-planar surfac2021
Wafer-based electronic component packaging2019
Method and structure for nanoimprint lithography masks using optical film coatin2018
Semiconductor device having trench capacitor structure integrated therein2017
Semiconductor device having capacitor integrated therein2016
Method for reliably addressing a large flash memory and flash memory2016
Method for contacting and connecting solar cells2016