Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, Eric Wang, Fred Alokozai, Dong Li +3 more | 2024-05-07 |
| 11830731 | Semiconductor deposition reactor manifolds | Dinkar Nandwana, Eric James Shero, Carl Louis White, Todd Robert Dunn, Jereld Lee Winkler +1 more | 2023-11-28 |
| 11306395 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, Eric Wang, Fred Alokozai, Dong Li +3 more | 2022-04-19 |
| 6645353 | Approach to optimizing an ILD argon sputter process | Brett E. Huff, Ken Schatz, Mike Maxim | 2003-11-11 |
| 5326723 | Method for improving stability of tungsten chemical vapor deposition | Farhad Moghadam | 1994-07-05 |
| 5260236 | UV transparent oxynitride deposition in single wafer PECVD system | Farhad Moghadam | 1993-11-09 |
| 4762728 | Low temperature plasma nitridation process and applications of nitride films formed thereby | Thomas Keyser, Bruce R. Cairns, Kranti V. Anand, Michael L. Barry | 1988-08-09 |