Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Dong Li +3 more | 2024-05-07 |
| 11967488 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Dong Li, Jereld Lee Winkler, Xichong Chen | 2024-04-23 |
| 11810788 | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures | Jerry Chen | 2023-11-07 |
| 11306395 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Dong Li +3 more | 2022-04-19 |
| 10714350 | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures | Jerry Chen | 2020-07-14 |
| 10023960 | Process gas management for an inductively-coupled plasma deposition reactor | Robert Brennan Milligan | 2018-07-17 |
| 9605342 | Process gas management for an inductively-coupled plasma deposition reactor | Robert Brennan Milligan | 2017-03-28 |
| 9412564 | Semiconductor reaction chamber with plasma capabilities | Robert Brennan Milligan | 2016-08-09 |
| 9340874 | Chamber sealing member | Michael Halpin, Eric James Shero, Carl Louis White, Jerry Winkler, Todd Robert Dunn | 2016-05-17 |
| 9299595 | Susceptor heater and method of heating a substrate | Todd Robert Dunn, Jerry Winkler, Michael Halpin | 2016-03-29 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Dong Li, Jereld Lee Winkler, Xichong Chen | 2016-01-05 |
| 9029253 | Phase-stabilized thin films, structures and devices including the thin films, and methods of forming same | Robert Brennan Milligan | 2015-05-12 |
| 9021985 | Process gas management for an inductively-coupled plasma deposition reactor | Robert Brennan Milligan | 2015-05-05 |
| 9018111 | Semiconductor reaction chamber with plasma capabilities | Robert Brennan Milligan | 2015-04-28 |
| 9005539 | Chamber sealing member | Michael Halpin, Eric James Shero, Carl Louis White, Jerry Winkler, Todd Robert Dunn | 2015-04-14 |
| 8933375 | Susceptor heater and method of heating a substrate | Todd Robert Dunn, Jerry Winkler, Michael Halpin | 2015-01-13 |
| 8894870 | Multi-step method and apparatus for etching compounds containing a metal | Jereld Lee Winkler, Eric James Shero | 2014-11-25 |