Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424464 | Radiation shield | — | 2025-09-23 |
| 12276023 | Showerhead assembly for distributing a gas within a reaction chamber | Jereld Lee Winkler, John Kevin Shugrue, Carl Louis White | 2025-04-15 |
| 12130084 | Vertical batch furnace assembly comprising a cooling gas supply | Christianus G.M. de Ridder | 2024-10-29 |
| 12094753 | Stage device and substrate processing apparatus | Einosuke Tsuda, Kentaro Asakura | 2024-09-17 |
| 12002661 | Susceptor having cooling device | Yukihiro Mori | 2024-06-04 |
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Fred Alokozai +3 more | 2024-05-07 |
| 11774298 | Multi-point thermocouples and assemblies for ceramic heating structures | Kentaro Asakura, Takashi Mochizuki, Takahisa Mase, Nobutaka Yoshioka, Saki Matsuo | 2023-10-03 |
| 11530876 | Vertical batch furnace assembly comprising a cooling gas supply | Christianus G.M. de Ridder | 2022-12-20 |
| 11417545 | Radiation shield | — | 2022-08-16 |
| 11306395 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Fred Alokozai +3 more | 2022-04-19 |
| 11225716 | Internally cooled multi-hole injectors for delivery of process chemicals | Anthony Dip | 2022-01-18 |
| 10692741 | Radiation shield | — | 2020-06-23 |