TM

Takahisa Mase

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,323,059 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
12256471 Apparatus for heating substrate and method thereof 2025-03-18
11774298 Multi-point thermocouples and assemblies for ceramic heating structures Melvin Verbaas, Kentaro Asakura, Takashi Mochizuki, Nobutaka Yoshioka, Saki Matsuo 2023-10-03
11488847 Apparatus and method for heat-treating substrate Hiroyuki Miyashita, Shohei Yoshida 2022-11-01