Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205799 | Plasma processing apparatus | Isao Gunji | 2025-01-21 |
| 11749511 | Plasma observation system and plasma observation method | Ryoji Yamazaki, Mikio Sato | 2023-09-05 |
| 11569558 | Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate | Isao Takahashi, Yuki Osada, Mitsuya Inoue, Mitsutoshi ASHIDA | 2023-01-31 |
| 11488847 | Apparatus and method for heat-treating substrate | Shohei Yoshida, Takahisa Mase | 2022-11-01 |
| 11205719 | Insulated-gate semiconductor device | — | 2021-12-21 |
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Yuki Osada, Susumu Saito, Kazuhiro Furuki +2 more | 2021-11-02 |
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Yutaka Fujino, Hikaru Adachi, Yuki Osada, Nobuhiko Yamamoto | 2017-07-11 |
| 9704693 | Power combiner and microwave introduction mechanism | Taro Ikeda | 2017-07-11 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |
| 9520272 | Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus | Taro Ikeda, Yuki Osada, Yutaka Fujino, Tomohito Komatsu | 2016-12-13 |
| 9520273 | Tuner, microwave plasma source and impedance matching method | Yuki Osada | 2016-12-13 |
| 9281154 | Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus | Taro Ikeda, Yuki Osada, Shigeru Kasai | 2016-03-08 |
| 8897631 | Annealing apparatus | Shigeru Kasai, Tomohiro Suzuki, Masatake Yoneda, Kazuhiro Ooya | 2014-11-25 |
| 8440939 | Annealing device | Shigeru Kasai, Tomohiro Suzuki, Sumi Tanaka, Masatake Yoneda | 2013-05-14 |
| 8246900 | Annealing apparatus | Shigeru Kasai, Masatake Yoneda, Tomohiro Suzuki, Sumi Tanaka, Masamichi Nomura +1 more | 2012-08-21 |
| 8124168 | Substrate processing method and substrate processing apparatus | Kunihiro Tada, Isao Gunji | 2012-02-28 |
| 7817077 | Differential comparator, and pipeline type A/D converter equipped with the same | — | 2010-10-19 |
| 7491705 | Alpha-ketoamide derivative, and production method and use thereof | Yoshihisa Shirasaki, Masayuki Nakamura, Jun Inoue | 2009-02-17 |
| 7151708 | Semiconductor integrated circuit and operational amplifier | Yasuhiro Hinokuma | 2006-12-19 |
| 5916712 | Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same | Hiroshi Mohri, Masahiro Takahashi, Naoya Hayashi | 1999-06-29 |
| 5880437 | Automatic control system and method using same | Shigeru Kasai | 1999-03-09 |
| 5738959 | Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same comprising fluorine in phase shift layer | Hiroshi Mohri, Masahiro Takahashi, Naoya Hayashi | 1998-04-14 |
| 5723234 | Phase shift photomask and phase shift photomask dry etching method | Toshifumi Yokoyama | 1998-03-03 |
| 5721075 | Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them | Keiji Hashimoto, Junji Fujikawa, Hiroshi Mohri, Masahiro Takahashi, Yukio Iimura | 1998-02-24 |
| 5702847 | Phase shift photomask, phase shift photomask blank, and process for fabricating them | Norihiro Tarumoto, Yukio Iimura, Koichi Mikami | 1997-12-30 |