Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9202731 | Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein | Shigeru Kasai, Ayuta Suzuki, Ikuo Sawada, Naoki Shindo, Kazuhiro Ooya | 2015-12-01 |
| 8897631 | Annealing apparatus | Shigeru Kasai, Hiroyuki Miyashita, Tomohiro Suzuki, Kazuhiro Ooya | 2014-11-25 |
| 8440939 | Annealing device | Shigeru Kasai, Tomohiro Suzuki, Sumi Tanaka, Hiroyuki Miyashita | 2013-05-14 |
| 8246900 | Annealing apparatus | Shigeru Kasai, Hiroyuki Miyashita, Tomohiro Suzuki, Sumi Tanaka, Masamichi Nomura +1 more | 2012-08-21 |
| 8110045 | Processing equipment for object to be processed | Shigeru Kasai, Masahiro Shimizu | 2012-02-07 |
| 8107801 | Heat treatment apparatus, computer program, and storage medium | Masahiro Shimizu, Shigeru Kasai | 2012-01-31 |
| 7978963 | Thermal processing apparatus | Masahiro Shimizu, Shigeru Kasai | 2011-07-12 |
| 7846255 | Processing equipment for object to be processed | Shigeru Kasai, Masahiro Shimizu | 2010-12-07 |
| 6905079 | Shower head structure and cleaning method thereof | Tomonao Kuwada, Takashi Nishimori | 2005-06-14 |
| 6733593 | Film forming device | Sumi Tanaka | 2004-05-11 |