Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406835 | Temperature controller, substrate processing apparatus, and pressure control method | — | 2025-09-02 |
| 6905079 | Shower head structure and cleaning method thereof | Masatake Yoneda, Takashi Nishimori | 2005-06-14 |