Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319567 | Microwave plasma source and plasma processing apparatus | Taro Ikeda, Shigeru Kasai, Nobuhiko Yamamoto | 2019-06-11 |
| 9640388 | Method for forming insulating film and method for manufacturing semiconductor device | Shigeru Kasai, Kotaro Miyatani, Takuya Kurotori, Kenichi KOTE, Yutaka Fujino +1 more | 2017-05-02 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada +1 more | 2017-01-17 |
| 5296404 | Method for forming a thin film for a semiconductor device | Takashi Akahori | 1994-03-22 |