Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640388 | Method for forming insulating film and method for manufacturing semiconductor device | Shigeru Kasai, Takuya Kurotori, Kenichi KOTE, Yutaka Fujino, Akira Tanihara +1 more | 2017-05-02 |
| 8383519 | Etching method and recording medium | Toshihisa Nozawa, Toshiyasu Hori, Shigekazu Hirose | 2013-02-26 |
| 8021975 | Plasma processing method for forming a film and an electronic component manufactured by the method | Kohei Kawamura, Toshihisa Nozawa, Takaaki Matsuoka | 2011-09-20 |
| 6776874 | Processing method and apparatus for removing oxide film | Yasuo Kobayashi, Kaoru Maekawa | 2004-08-17 |
| 6706334 | Processing method and apparatus for removing oxide film | Yasuo Kobayashi, Kaoru Maekawa | 2004-03-16 |