Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9117764 | Etching method, substrate processing method, pattern forming method, method for manufacturing semiconductor element, and semiconductor element | Takaaki Matsuoka, Toshihisa Nozawa | 2015-08-25 |
| 8383519 | Etching method and recording medium | Toshihisa Nozawa, Kotaro Miyatani, Shigekazu Hirose | 2013-02-26 |