Issued Patents All Time
Showing 1–25 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272548 | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method | Shinya Yoshimoto, Jun Yoshikawa | 2025-04-08 |
| 12129548 | Method of forming structures using a neutral beam | Tomohiro Kubota, Mitsuya Utsuno, Seiji Samukawa, Hua Chen | 2024-10-29 |
| 11929251 | Substrate processing apparatus having electrostatic chuck and substrate processing method | — | 2024-03-12 |
| 11908684 | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method | Shinya Yoshimoto, Jun Yoshikawa | 2024-02-20 |
| 11643724 | Method of forming structures using a neutral beam | Tomohiro Kubota, Mitsuya Utsuno, Seiji Samukawa, Hua Chen | 2023-05-09 |
| 11605528 | Plasma device using coaxial waveguide, and substrate treatment method | Jun Yoshikawa | 2023-03-14 |
| 11482418 | Substrate processing method and apparatus | Akinori Nakano, Ryu Nakano | 2022-10-25 |
| 11476109 | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method | Shinya Yoshimoto, Jun Yoshikawa | 2022-10-18 |
| 10844489 | Film forming apparatus and shower head | Masahide Iwasaki, Kohei Yamashita | 2020-11-24 |
| 10658181 | Method of spacer-defined direct patterning in semiconductor fabrication | Dai Ishikawa, Tomohiro Kubota | 2020-05-19 |
| 10424462 | Multi-cell resonator microwave surface-wave plasma apparatus | Merritt Funk, Megan Doppel, John Entralgo, Jianping Zhao | 2019-09-24 |
| 10388557 | Placing bed structure, treating apparatus using the structure, and method for using the apparatus | Kohei Kawamura, Yasuo Kobayashi, Kiyotaka Ishibashi | 2019-08-20 |
| 10290523 | Wafer processing apparatus, recording medium and wafer conveying method | — | 2019-05-14 |
| 10262865 | Methods for manufacturing semiconductor devices | Atsuki Fukazawa | 2019-04-16 |
| 10145014 | Film forming apparatus | Masahide Iwasaki, Toshihiko Iwao | 2018-12-04 |
| 9960033 | Method of depositing and etching Si-containing film | — | 2018-05-01 |
| 9947516 | Top dielectric quartz plate and slot antenna concept | Jianping Zhao | 2018-04-17 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Zhiying Chen +1 more | 2018-04-17 |
| 9896762 | Method of depositing and etching film in one processing apparatus | — | 2018-02-20 |
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Zhiying Chen +1 more | 2017-10-17 |
| 9767994 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Atsutoshi Inokuchi +1 more | 2017-09-19 |
| 9631274 | Plasma processing apparatus | Shinji Komoto, Masahide Iwasaki | 2017-04-25 |
| 9574267 | Plasma processing apparatus | Shinji Komoto, Masahide Iwasaki | 2017-02-21 |
| 9343270 | Plasma processing apparatus | Jun Yoshikawa, Michitaka Aita, Masahiro Yamazaki, Takehisa Saito, Fumihiko Kaji +1 more | 2016-05-17 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Caizhong Tian, Masaru Sasaki, Naoki Mihara, Naoki Matsumoto, Kazuki Moyama +1 more | 2016-03-01 |