Issued Patents All Time
Showing 51–75 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8263174 | Light emitting device and method for manufacturing light emitting device | Yasushi Yagi, Shingo Watanabe, Chuichi Kawamura, Kimihiko Yoshino, Tadahiro Ohmi | 2012-09-11 |
| 8173928 | Processing device | Tamaki Yuasa | 2012-05-08 |
| 8158012 | Film forming apparatus and method for manufacturing light emitting element | Shingo Watanabe | 2012-04-17 |
| 8123194 | On-off valve and process apparatus employing the on-off valve | — | 2012-02-28 |
| 8124523 | Fabrication method of a semiconductor device and a semiconductor device | Kohei Kawamura, Takaaki Matsuoka | 2012-02-28 |
| 8110044 | Substrate processing apparatus and temperature control device | Koji Kotani | 2012-02-07 |
| 8091863 | Gate valve and semiconductor manufacturing apparatus | Shinji Komoto | 2012-01-10 |
| 8052887 | Substrate processing apparatus | Tamaki Yuasa | 2011-11-08 |
| 8021975 | Plasma processing method for forming a film and an electronic component manufactured by the method | Kotaro Miyatani, Kohei Kawamura, Takaaki Matsuoka | 2011-09-20 |
| 7940009 | Plasma processing apparatus | Kiyotaka Ishibashi | 2011-05-10 |
| 7930992 | Plasma processing equipment | Kiyotaka Ishibashi | 2011-04-26 |
| 7895971 | Microwave plasma processing apparatus | Caizhong Tian | 2011-03-01 |
| 7874781 | Substrate processing apparatus | Takaaki Matsuoka | 2011-01-25 |
| 7828927 | Plasma processing device | Kiyotaka Ishibashi | 2010-11-09 |
| 7779783 | Plasma processing device | Kiyotaka Ishibashi | 2010-08-24 |
| 7754995 | Plasma processing apparatus and plasma processing method | Masaru Sasaki, Masaji Inoue | 2010-07-13 |
| 7469654 | Plasma processing device | Kiyotaka Ishibashi | 2008-12-30 |
| 7396431 | Plasma processing system for treating a substrate | Lee Chen, Hiromitsu Kambara, Caizhong Tian, Tetsuya Nishizuka | 2008-07-08 |
| 7268084 | Method for treating a substrate | Lee Chen, Hitomitsu Kambara, Caiz Hong Tian, Tetsuya Nishizuka | 2007-09-11 |
| 6261428 | Magnetron plasma process apparatus | Keiji Horioka, Isahiro Hasegawa | 2001-07-17 |
| 5888846 | Method for microfabricating diamond | Koichi Miyata, Koji Kobashi, Kohei Suzuki | 1999-03-30 |
| 5539179 | Electrostatic chuck having a multilayer structure for attracting an object | Junichi Arami, Shinji Kubota, Isahiro Hasegawa, Katsuya Okumura | 1996-07-23 |
| 5290381 | Plasma etching apparatus | Junichi Arami, Keiji Horioka, Isahiro Hasegawa | 1994-03-01 |
| 5271788 | Plasma processing apparatus | Makoto Hasegawa, Takaya Matsushita, Keiji Horioka, Isahiro Hasegawa, Yoshio Ishikawa +2 more | 1993-12-21 |
| 5255153 | Electrostatic chuck and plasma apparatus equipped therewith | Junichi Arami, Isahiro Hasegawa, Katsuya Okumura | 1993-10-19 |