Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7584714 | Method and system for improving coupling between a surface wave plasma source and a plasma space | Lee Chen, Naoki Matsumoto | 2009-09-08 |
| 7268084 | Method for treating a substrate | Lee Chen, Hitomitsu Kambara, Tetsuya Nishizuka, Toshihisa Nozawa | 2007-09-11 |
| 7138767 | Surface wave plasma processing system and method of using | Lee Chen, Naoki Matsumoto | 2006-11-21 |