Issued Patents All Time
Showing 76–81 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5250137 | Plasma treating apparatus | Junichi Arami, Keiji Horioka, Katsuya Okumura | 1993-10-05 |
| 5234527 | Liquid level detecting device and a processing apparatus | Junichi Arami, Yukimasa Yoshida, Keiji Horioka | 1993-08-10 |
| 5223113 | Apparatus for forming reduced pressure and for processing object | Satoshi Kaneko, Taichi Fugita, Yoichi Ueda, Yukimasa Yoshida, Isahiro Hasegawa +1 more | 1993-06-29 |
| 5221403 | Support table for plate-like body and processing apparatus using the table | Junichi Arami, Isahiro Hasegawa, Haruo Okano | 1993-06-22 |
| 5147497 | Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency wave is applied | Osamu Kamikanda, Yukimasa Yoshida, Haruo Okano | 1992-09-15 |
| 5115118 | Heat-treatment furnace | Hiromi Harada | 1992-05-19 |