Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5311452 | Plasma processing apparatus using capacitance manometer and pressure control method thereof | Takashi Yokota | 1994-05-10 |
| 5147497 | Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency wave is applied | Toshihisa Nozawa, Yukimasa Yoshida, Haruo Okano | 1992-09-15 |