Issued Patents All Time
Showing 26–50 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177846 | Placing bed structure, treating apparatus using the structure, and method for using the apparatus | Kohei Kawamura, Yasuo Kobayashi, Kiyotaka Ishibashi | 2015-11-03 |
| 9117764 | Etching method, substrate processing method, pattern forming method, method for manufacturing semiconductor element, and semiconductor element | Takaaki Matsuoka, Toshiyasu Hori | 2015-08-25 |
| 8973527 | Plasma processing apparatus, plasma processing method, method for cleaning plasma processing apparatus and pressure control valve for plasma processing apparatus | Shinji Komoto, Masahide Iwasaki | 2015-03-10 |
| 8974628 | Plasma treatment device and optical monitor device | Takahiro Senda, Shinya Nishimoto, Munetaka Yamagami, Kazuki Moyama | 2015-03-10 |
| 8967080 | Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method | Caizhong Tian, Kiyotaka Ishibashi | 2015-03-03 |
| 8968472 | Valve and processing apparatus provided with the same | — | 2015-03-03 |
| 8969210 | Plasma etching apparatus, plasma etching method, and semiconductor device manufacturing method | Masaru Sasaki, Jun Hashimoto, Shota Yoshimura, Toshihisa Ozu, Tetsuya Nishizuka | 2015-03-03 |
| 8967082 | Plasma processing apparatus and gas supply device for plasma processing apparatus | Masahide Iwasaki | 2015-03-03 |
| 8925351 | Manufacturing method of top plate of plasma processing apparatus | Caizhong Tian, Kiyotaka Ishibashi | 2015-01-06 |
| 8915999 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Atsutoshi Inokuchi +1 more | 2014-12-23 |
| 8815014 | Method and system for performing different deposition processes within a single chamber | Jacques Faguet, Masahide Iwasaki | 2014-08-26 |
| 8785809 | Processing device | Tamaki Yuasa | 2014-07-22 |
| 8765605 | Surface treatment for a fluorocarbon film | Masahiro Horigome, Takuya Kurotori, Yasuo Kobayashi, Takaaki Matsuoka | 2014-07-01 |
| 8545711 | Processing method | Koji Kotani, Kouji Tanaka | 2013-10-01 |
| 8500089 | Method of operating on-off valve | — | 2013-08-06 |
| 8497214 | Semiconductor device manufacturing method | Hirokazu Ueda, Takaaki Matsuoka, Akinobu Teramoto, Tadahiro Ohmi | 2013-07-30 |
| 8486792 | Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device | Hirokazu Ueda, Yoshinobu Tanaka, Yusuke Ohsawa, Takaaki Matsuoka | 2013-07-16 |
| 8480848 | Plasma processing apparatus | Caizhong Tian, Tetsuya Nishizuka | 2013-07-09 |
| 8387560 | Plasma processing unit | Caizhong Tian, Kiyotaka Ishibashi, Junichi Kitagawa | 2013-03-05 |
| 8383519 | Etching method and recording medium | Kotaro Miyatani, Toshiyasu Hori, Shigekazu Hirose | 2013-02-26 |
| 8366869 | Processing apparatus and processing method | Koji Kotani, Kouji Tanaka | 2013-02-05 |
| 8343308 | Ceiling plate and plasma process apparatus | Caizhong Tian, Tetsuya Nishizuka, Kiyotaka Ishibashi | 2013-01-01 |
| 8323521 | Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques | Jianping Zhao, Lee Chen, Merritt Funk | 2012-12-04 |
| 8273210 | Plasma processing apparatus and method for adjusting plasma density distribution | Caizhong Tian, Kiyotaka Ishibashi | 2012-09-25 |
| 8267040 | Plasma processing apparatus and plasma processing method | Kiyotaka Ishibashi, Junichi Kitagawa, Singo Furui, Cai Zhong Tian, Jun Yamashita +4 more | 2012-09-18 |