Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9631274 | Plasma processing apparatus | Toshihisa Nozawa, Masahide Iwasaki | 2017-04-25 |
| 9574267 | Plasma processing apparatus | Toshihisa Nozawa, Masahide Iwasaki | 2017-02-21 |
| 8973527 | Plasma processing apparatus, plasma processing method, method for cleaning plasma processing apparatus and pressure control valve for plasma processing apparatus | Toshihisa Nozawa, Masahide Iwasaki | 2015-03-10 |
| 8419859 | Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method | Noriaki Fukiage, Hiroyuki Takaba, Kiyotaka Ishibashi | 2013-04-16 |
| 8091863 | Gate valve and semiconductor manufacturing apparatus | Toshihisa Nozawa | 2012-01-10 |