Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077855 | Cleaning method and film deposition apparatus | Hideomi HANE, Akihiro Kuribayashi | 2024-09-03 |
| 11970768 | Film forming method and film forming apparatus | Hideomi HANE, Shimon Otsuki, Takeshi Oyama, Ren MUKOUYAMA, Jun Ogawa | 2024-04-30 |
| 11725276 | Plasma purge method | Hideomi HANE, Hyunjoon Bang | 2023-08-15 |
| 11508571 | Film forming method and film forming apparatus | Jun Ogawa | 2022-11-22 |
| 11201053 | Film forming method and film forming apparatus | Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2021-12-14 |
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Hiroaki Ikegawa +2 more | 2021-11-09 |
| 10900121 | Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device | Kentaro Oshimo, Shimon Otsuki, Hideomi HANE, Jun Ogawa, Hiroaki Ikegawa | 2021-01-26 |
| 10714332 | Film forming method and film forming apparatus | Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2020-07-14 |
| 10626496 | Film forming apparatus, method of cleaning film forming apparatus, and storage medium | Takayuki Karakawa, Jun Ogawa, Yasuo Kobayashi | 2020-04-21 |
| 10573512 | Film forming method | Takeshi Oyama | 2020-02-25 |
| 10438791 | Film forming method, film forming apparatus, and storage medium | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Hiroaki Ikegawa +2 more | 2019-10-08 |
| 10151029 | Silicon nitride film forming method and silicon nitride film forming apparatus | Takeshi Oyama, Jun Ogawa | 2018-12-11 |
| 9922820 | Film forming method and film forming apparatus | Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa | 2018-03-20 |
| 9892909 | Film forming method and film forming apparatus | Takayuki Karakawa, Akihiro Kuribayashi, Jun Ogawa | 2018-02-13 |
| 9478410 | Method of forming nitride film with plasma | Toyohiro KAMADA, Takayuki Karakawa | 2016-10-25 |
| 8419859 | Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method | Shinji Komoto, Hiroyuki Takaba, Kiyotaka Ishibashi | 2013-04-16 |
| 7862683 | Chamber dry cleaning | — | 2011-01-04 |
| 7718497 | Method for manufacturing semiconductor device | Yasushi Akasaka, Yoshihiro Kato, Kazuhide Hasebe, Pao-Hwa Chou | 2010-05-18 |
| 7611758 | Method of improving post-develop photoresist profile on a deposited dielectric film | Katherina Babich | 2009-11-03 |
| 7371436 | Method and apparatus for depositing materials with tunable optical properties and etching characteristics | — | 2008-05-13 |
| 7201174 | Processing apparatus and cleaning method | — | 2007-04-10 |
| 6773762 | Plasma treatment method | — | 2004-08-10 |
| 6753610 | Semiconductor device having multilayer interconnection structure and method of making the same | — | 2004-06-22 |
| 6699531 | Plasma treatment method | — | 2004-03-02 |
| 6576569 | Method of plasma-assisted film deposition | — | 2003-06-10 |