Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Shuji Tanaka | Ube Industries | 121 |
| 2 | Noriaki Fukiage | Tokyo Electron Limited | 25 |
| 3 | Masayuki Kohno | Tokyo Electron Limited | 15 |
| #4 | Toshiharu Wada | Tokyo Electron Limited | 14 |
| #5 | Manabu Oie | Tokyo Electron Limited | 5 |
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