Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557479 | Methods for EUV inverse patterning in processing of microelectronic workpieces | Eric Chih-Fang Liu, Akiteru Ko, Subhadeep Kal | 2023-01-17 |
| 11537049 | Method of line roughness improvement by plasma selective deposition | Chia-Yun Hsieh, Akiteru Ko | 2022-12-27 |
| 11276572 | Technique for multi-patterning substrates | — | 2022-03-15 |
| 11049721 | Method and process for forming memory hole patterns | Akiteru Ko, Anton J. deVilliers | 2021-06-29 |
| 10978300 | Methods to reduce gouging for core removal processes using thermal decomposition materials | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2021-04-13 |
| 10950442 | Methods to reshape spacers for multi-patterning processes using thermal decomposition materials | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2021-03-16 |
| 10916428 | Method to transfer patterns to a layer | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2021-02-09 |
| 10861739 | Method of patterning low-k materials using thermal decomposition materials | Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko | 2020-12-08 |
| 10128085 | Method of plasma etching | — | 2018-11-13 |
| 9847231 | Method of etching | — | 2017-12-19 |
| 9583317 | Plasma processing method and plasma processing apparatus | — | 2017-02-28 |
| 7007713 | Pressure control apparatus | Mitsutoshi Araki, Shinichi Ito | 2006-03-07 |
| 6913115 | Fluid pressure-operated apparatus-connecting device | Taku Tomita, Takehiko Kanazawa, Mitsutoshi Araki, Makoto Wada | 2005-07-05 |
| 6145627 | Zero point position-determining mechanism for pressurized fluid-driven apparatuses | — | 2000-11-14 |