Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538900 | Semiconductor device and method of fabricating the same | — | 2022-12-27 |
| 9721803 | Etching method for substrate to be processed and plasma-etching device | — | 2017-08-01 |
| 9293346 | Method for etching organic film and plasma etching device | Hironori Matsuoka | 2016-03-22 |
| 8962454 | Method of depositing dielectric films using microwave plasma | — | 2015-02-24 |
| 8778810 | Plasma treatment method | — | 2014-07-15 |
| 8419859 | Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method | Noriaki Fukiage, Shinji Komoto, Kiyotaka Ishibashi | 2013-04-16 |
| 8399366 | Method of depositing highly conformal amorphous carbon films over raised features | — | 2013-03-19 |
| 7820503 | Semiconductor device and manufacturing method of the same | Toshihide Nabatame, Masaru Kadoshima | 2010-10-26 |
| 7511338 | Semiconductor device and manufacturing method of the same | Toshihide Nabatame, Masaru Kadoshima | 2009-03-31 |