Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970768 | Film forming method and film forming apparatus | Hideomi HANE, Takeshi Oyama, Ren MUKOUYAMA, Jun Ogawa, Noriaki Fukiage | 2024-04-30 |
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama +3 more | 2021-12-14 |
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Jun Ogawa, Noriaki Fukiage, Hiroaki Ikegawa +2 more | 2021-11-09 |
| 10900121 | Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device | Noriaki Fukiage, Kentaro Oshimo, Hideomi HANE, Jun Ogawa, Hiroaki Ikegawa | 2021-01-26 |
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama +3 more | 2020-07-14 |
| 10550470 | Film forming apparatus and operation method of film forming apparatus | Hideomi HANE, Kentaro Oshimo, Takeshi Oyama, Hiroaki Ikegawa, Jun Ogawa | 2020-02-04 |
| 10438791 | Film forming method, film forming apparatus, and storage medium | Hideomi HANE, Kentaro Oshimo, Jun Ogawa, Noriaki Fukiage, Hiroaki Ikegawa +2 more | 2019-10-08 |