Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417514 | Film forming method and film forming apparatus | Yuichiro WAGATSUMA, Shinichi Ike, Shuji AZUMO | 2022-08-16 |
| 11201053 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2021-12-14 |
| 10714332 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2020-07-14 |
| 9922820 | Film forming method and film forming apparatus | Noriaki Fukiage, Takayuki Karakawa, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa | 2018-03-20 |
| 9478410 | Method of forming nitride film with plasma | Noriaki Fukiage, Takayuki Karakawa | 2016-10-25 |