Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8293067 | Microwave plasma processing device and gate valve for microwave plasma processing device | Sunao Muraoka, Hideki Nagaoka, Masakazu Ban | 2012-10-23 |
| 8267040 | Plasma processing apparatus and plasma processing method | Kiyotaka Ishibashi, Junichi Kitagawa, Singo Furui, Jun Yamashita, Nobuhiko Yamamoto +4 more | 2012-09-18 |
| 7993488 | Microwave plasma processing device and gate valve for microwave plasma processing device | Sunao Muraoka, Hideki Nagaoka, Masakazu Ban | 2011-08-09 |
| D594485 | Top panel for microwave introduction window of a plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2009-06-16 |
| D593585 | Top panel for microwave introduction window of a plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2009-06-02 |
| D589034 | Microwave introducing antenna for a plasma processing apparatus | Atsushi Ueda | 2009-03-24 |
| D572733 | Top panel for microwave introduction window of a plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2008-07-08 |
| D572707 | Microwave introducing antenna for a plasma processing apparatus | Jun Yamashita | 2008-07-08 |
| D571832 | Top panel for microwave introduction window of a plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2008-06-24 |
| D571831 | Top panel for microwave introduction window of a plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2008-06-24 |
| D571833 | Top panel for microwave introduction window of plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2008-06-24 |
| D571383 | Top panel for microwave introduction window of a plasma processing apparatus | Kinya Ota, Junichi Kitagawa | 2008-06-17 |
| D563951 | Microwave introducing antenna for a plasma processing apparatus | Jun Yamashita | 2008-03-11 |
| D563950 | Microwave introducing antenna for a plasma processing apparatus | Jun Yamashita, Tamaki Yuasa | 2008-03-11 |
| D563949 | Microwave introducing antenna for a plasma processing apparatus | Jun Yamashita | 2008-03-11 |