Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8785809 | Processing device | Toshihisa Nozawa | 2014-07-22 |
| 8485127 | Processing apparatus | Shinya Nishimoto | 2013-07-16 |
| 8267040 | Plasma processing apparatus and plasma processing method | Kiyotaka Ishibashi, Junichi Kitagawa, Singo Furui, Cai Zhong Tian, Jun Yamashita +4 more | 2012-09-18 |
| 8173928 | Processing device | Toshihisa Nozawa | 2012-05-08 |
| 8052887 | Substrate processing apparatus | Toshihisa Nozawa | 2011-11-08 |
| D563950 | Microwave introducing antenna for a plasma processing apparatus | Jun Yamashita, Cai Zhong Tian | 2008-03-11 |