Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8318267 | Method and apparatus for forming silicon oxide film | Yoshiro Kabe, Junichi Kitagawa | 2012-11-27 |
| 8293067 | Microwave plasma processing device and gate valve for microwave plasma processing device | Hideki Nagaoka, Masakazu Ban, Cai Zhong Tian | 2012-10-23 |
| 7993488 | Microwave plasma processing device and gate valve for microwave plasma processing device | Hideki Nagaoka, Masakazu Ban, Cai Zhong Tian | 2011-08-09 |
| 5913978 | Apparatus and method for regulating pressure in two chambers | Susumu Kato, Masahito Ozawa | 1999-06-22 |