Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6702865 | Alignment processing mechanism and semiconductor processing device using it | Masaki Narushima | 2004-03-09 |
| 6395094 | Process system with transfer unit for object to be processed | Keiichi Tanaka, Shinsuke Asao, Masaki Sohma | 2002-05-28 |
| 6234107 | Auxiliary vacuum chamber and vacuum processing unit using same | Keiichi Tanaka, Masaki Sohma, Shinsuke Asao | 2001-05-22 |
| 5913978 | Apparatus and method for regulating pressure in two chambers | Susumu Kato, Sunao Muraoka | 1999-06-22 |
| 5474410 | Multi-chamber system provided with carrier units | Masami Mizukami, Masanobu Kanazashi, Toshihiko Takasoe, Masaki Narushima, Masao Kubodera | 1995-12-12 |
| 5332442 | Surface processing apparatus | Masao Kubodera, Masaki Narushima, Hiromi Kumagai, Tomihiro Yonenaga, Sumi Tanaka | 1994-07-26 |
| 4779861 | Sheet separator/feeder | Masao Goto | 1988-10-25 |