Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395094 | Process system with transfer unit for object to be processed | Keiichi Tanaka, Masahito Ozawa, Masaki Sohma | 2002-05-28 |
| 6234107 | Auxiliary vacuum chamber and vacuum processing unit using same | Keiichi Tanaka, Masaki Sohma, Masahito Ozawa | 2001-05-22 |