Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6247889 | Multiple-shaft power transmission apparatus and wafer transport arm link | Hiroko Kono | 2001-06-19 |
| 5916455 | Method and apparatus for generating a low pressure plasma | — | 1999-06-29 |
| 5888338 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1999-03-30 |
| 5660671 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1997-08-26 |
| 5439547 | Semiconductor manufacturing apparatus with a spare vacuum chamber | — | 1995-08-08 |
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1994-12-27 |
| 5332442 | Surface processing apparatus | Masao Kubodera, Masaki Narushima, Masahito Ozawa, Tomihiro Yonenaga, Sumi Tanaka | 1994-07-26 |
| 4954685 | Heating furnace for semiconductor wafers | Kaoru Sato, Yoshio Imai | 1990-09-04 |
| 4733632 | Wafer feeding apparatus | Tadahiro Ohmi, Yoshiaki Yanagi | 1988-03-29 |