Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322578 | Exhaust device, processing apparatus, and exhausting method | Kazuya Nagaseki, Toshiya Matsuda, Naokazu Furuya, Tatsuro Ohshita | 2025-06-03 |
| 12186898 | Part transporting device and processing system | Kazuya Nagaseki, Toshiya Matsuda | 2025-01-07 |
| 11721524 | Power generation systems and methods for plasma stability and control | Merritt Funk, Chelsea DuBose, Justin Moses, Kazushi Kaneko | 2023-08-08 |
| 11699573 | Plasma processing method | Kazuya Nagaseki | 2023-07-11 |
| 11613432 | Processing system and method using transporting device facilitating replacement of consumable part | Kazuya Nagaseki, Toshiya Matsuda | 2023-03-28 |
| 11315770 | Exhaust device for processing apparatus provided with multiple blades | Kazuya Nagaseki, Toshiya Matsuda, Naokazu Furuya, Tatsuro Ohshita | 2022-04-26 |
| 11107663 | Plasma processing system and plasma processing method | Kazuya Nagaseki | 2021-08-31 |
| 11094507 | Power generation systems and methods for plasma stability and control | Merritt Funk, Chelsea DuBose, Justin Moses, Kazushi Kaneko | 2021-08-17 |
| 11050394 | Modules, multi-stage systems, and related methods for radio frequency power amplifiers | Chelsea DuBose, Merritt Funk, Justin Moses, Kazushi Kaneko | 2021-06-29 |
| 11041241 | Plasma processing apparatus and temperature control method | Akihiro Yokota, Koji Maruyama | 2021-06-22 |
| 11043389 | Substrate processing method | Kazuya Nagaseki | 2021-06-22 |
| 10896842 | Manufacturing method of sample table | Wataru Yoshikawa, Nobuyuki Okayama, Kenji Sudou, Yasuhiro Otsuka | 2021-01-19 |
| 10510512 | Methods and systems for controlling plasma performance | Merritt Funk, Megan Doppel, Chelsea DuBose, Justin Moses | 2019-12-17 |
| 9892951 | Method of controlling adherence of microparticles to substrate to be processed, and processing apparatus | Takehiro Tanikawa | 2018-02-13 |
| 9595425 | Antenna, dielectric window, plasma processing apparatus and plasma processing method | Naoki Matsumoto, Wataru Yoshikawa, Jun Yoshikawa, Kiyotaka Ishibashi, Osamu Morita +1 more | 2017-03-14 |
| 9324572 | Plasma etching method, method for producing semiconductor device, and plasma etching device | Masaru Sasaki, Masaki Inoue, Yoko Noto | 2016-04-26 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Toshihisa Nozawa, Caizhong Tian, Masaru Sasaki, Naoki Mihara, Naoki Matsumoto +1 more | 2016-03-01 |
| 9111726 | Plasma processing apparatus | Kiyotaka Ishibashi, Osamu Morita, Takehiro Tanikawa, Naoki Matsumoto, Naoki Mihara +1 more | 2015-08-18 |
| 9048070 | Dielectric window for plasma treatment device, and plasma treatment device | Caizhong Tian, Naoki Matsumoto, Koji Koyama, Naoki Mihara, Kazuki Takahashi +2 more | 2015-06-02 |
| 8974628 | Plasma treatment device and optical monitor device | Toshihisa Nozawa, Takahiro Senda, Shinya Nishimoto, Munetaka Yamagami | 2015-03-10 |
| 8841545 | Solar cell wherein solar photovolatic thin film is directly formed on base | Yoshihide Wakayama, Tadahiro Ohmi, Akinobu Teramoto | 2014-09-23 |
| 8328999 | Method for controlling film forming apparatus, film forming method, film forming apparatus, organic EL electronic device, and storage medium having program for controlling film forming apparatus stored therein | — | 2012-12-11 |