Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896842 | Manufacturing method of sample table | Wataru Yoshikawa, Kazuki Moyama, Nobuyuki Okayama, Yasuhiro Otsuka | 2021-01-19 |
| 9324542 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Michitaka Aita +5 more | 2016-04-26 |
| 8663424 | Plasma processing apparatus and gas supply member support device | Naoki Mihara, Kazuo Murakami, Satoshi Furukawa | 2014-03-04 |