Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543807 | Mounting state informing apparatus and mounting state informing method | Naoto Hayasaka, Kouko Yumura, Junsuke Hoshiya | 2023-01-03 |
| 10319568 | Plasma processing apparatus for performing plasma process for target object | Ippei Shimizu, Shunsuke Ogata | 2019-06-11 |
| 10312057 | Plasma processing apparatus | Masayuki Kohno, Yusuke Yoshida, Naoki Matsumoto, Ippei Shimizu, Jun Yoshikawa +3 more | 2019-06-04 |
| 10062547 | Plasma processing apparatus | Naoki Matsumoto, Jun Yoshikawa, Kazuo Murakami | 2018-08-28 |
| 9324542 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Yugo Tomita, Kazuki Takahashi, Michitaka Aita, Jun Yoshikawa +5 more | 2016-04-26 |
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Toshihisa Nozawa, Caizhong Tian, Masaru Sasaki, Naoki Matsumoto, Kazuki Moyama +1 more | 2016-03-01 |
| 9111726 | Plasma processing apparatus | Kazuki Moyama, Kiyotaka Ishibashi, Osamu Morita, Takehiro Tanikawa, Naoki Matsumoto +1 more | 2015-08-18 |
| 9048070 | Dielectric window for plasma treatment device, and plasma treatment device | Caizhong Tian, Naoki Matsumoto, Koji Koyama, Kazuki Takahashi, Jun Yoshikawa +2 more | 2015-06-02 |
| 8920596 | Plasma processing apparatus | Naoki Matsumoto, Jun Yoshikawa, Kazuo Murakami | 2014-12-30 |
| 8663424 | Plasma processing apparatus and gas supply member support device | Kenji Sudou, Kazuo Murakami, Satoshi Furukawa | 2014-03-04 |
| 7374646 | Electrolytic processing apparatus and substrate processing method | Hidenao Suzuki, Kazufumi Nomura, Kunihito Ide, Hiroyuki Kanda, Koji Mishima +2 more | 2008-05-20 |