Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9277637 | Apparatus for plasma treatment and method for plasma treatment | Toshihisa Nozawa, Masaru Sasaki, Naoki Mihara, Naoki Matsumoto, Kazuki Moyama +1 more | 2016-03-01 |
| 9048070 | Dielectric window for plasma treatment device, and plasma treatment device | Naoki Matsumoto, Koji Koyama, Naoki Mihara, Kazuki Takahashi, Jun Yoshikawa +2 more | 2015-06-02 |
| 8967080 | Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method | Kiyotaka Ishibashi, Toshihisa Nozawa | 2015-03-03 |
| 8925351 | Manufacturing method of top plate of plasma processing apparatus | Toshihisa Nozawa, Kiyotaka Ishibashi | 2015-01-06 |
| 8480848 | Plasma processing apparatus | Tetsuya Nishizuka, Toshihisa Nozawa | 2013-07-09 |
| 8387560 | Plasma processing unit | Kiyotaka Ishibashi, Junichi Kitagawa, Toshihisa Nozawa | 2013-03-05 |
| 8343308 | Ceiling plate and plasma process apparatus | Tetsuya Nishizuka, Kiyotaka Ishibashi, Toshihisa Nozawa | 2013-01-01 |
| 8273210 | Plasma processing apparatus and method for adjusting plasma density distribution | Kiyotaka Ishibashi, Toshihisa Nozawa | 2012-09-25 |
| 7895971 | Microwave plasma processing apparatus | Toshihisa Nozawa | 2011-03-01 |
| 7396431 | Plasma processing system for treating a substrate | Lee Chen, Hiromitsu Kambara, Tetsuya Nishizuka, Toshihisa Nozawa | 2008-07-08 |