Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Masaru Nishino, Reo Kosaka, Matthew C. Gwinn, Luis Fernandez +3 more | 2023-07-04 |
| 11450506 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Masaru Nishino, Reo Kosaka, Matthew C. Gwinn, Luis Fernandez +3 more | 2022-09-20 |
| 7709397 | Method and system for etching a high-k dielectric material | Lee Chen, Nobuhiro Iwama, Akiteru Ko, Hiromasa Mochiki, Masaaki Hagihara | 2010-05-04 |
| 7396431 | Plasma processing system for treating a substrate | Lee Chen, Caizhong Tian, Tetsuya Nishizuka, Toshihisa Nozawa | 2008-07-08 |
| 6852584 | Method of trimming a gate electrode structure | Lee Chen, Hongyu Yue | 2005-02-08 |