Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2012-08-28 |
| 7709397 | Method and system for etching a high-k dielectric material | Lee Chen, Hiromitsu Kambara, Akiteru Ko, Hiromasa Mochiki, Masaaki Hagihara | 2010-05-04 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2009-05-05 |