Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496150 | Etching processing method | Shin Okamoto, Takashi Nishijima, Fumio Yamazaki | 2016-11-15 |
| 9373521 | Etching processing method | Shin Okamoto, Takashi Nishijima, Fumio Yamazaki | 2016-06-21 |
| 9136097 | Shower plate and substrate processing apparatus | Chishio Koshimizu, Kazuki Denpoh | 2015-09-15 |
| 8685267 | Substrate processing method | Koichi Yatsuda | 2014-04-01 |
| 8641916 | Plasma etching apparatus, plasma etching method and storage medium | Koichi Yatsuda, Yoshinobu Ooya, Shin Okamoto | 2014-02-04 |
| 8383001 | Plasma etching method, plasma etching apparatus and storage medium | Yoshinobu Ooya, Fumio Yamazaki, Toshio Haga | 2013-02-26 |
| 7829469 | Method and system for uniformity control in ballistic electron beam enhanced plasma processing system | Lee Chen | 2010-11-09 |
| 7723236 | Gas setting method, gas setting apparatus, etching apparatus and substrate processing system | — | 2010-05-25 |
| 7709397 | Method and system for etching a high-k dielectric material | Lee Chen, Hiromitsu Kambara, Nobuhiro Iwama, Akiteru Ko, Masaaki Hagihara | 2010-05-04 |
| 7172969 | Method and system for etching a film stack | Annie Xia, Arpan Mahorowala | 2007-02-06 |