Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051570 | Plasma processing apparatus | Maju TOMURA, Ryohei TAKEDA, Ryuichi TAKASHIMA | 2024-07-30 |
| 10410877 | Etching method | Ryuichi TAKASHIMA, Taku Gohira | 2019-09-10 |
| 10381237 | Etching method | Ryohei TAKEDA, Sho Tominaga | 2019-08-13 |
| 9997374 | Etching method | Ryohei TAKEDA, Sho Tominaga | 2018-06-12 |
| 9922806 | Etching method and plasma processing apparatus | Maju TOMURA, Ryohei TAKEDA, Ryuichi TAKASHIMA | 2018-03-20 |
| 9812996 | Method for calculating distance, method for neutralizing electrostatic chuck, and processing apparatus | Kenji Nagai | 2017-11-07 |
| 9659789 | Etching method and etching apparatus | Ryohei TAKEDA, Ryuichi TAKASHIMA | 2017-05-23 |
| 9478387 | Plasma processing apparatus | Akira Tanabe, Yoshinori Yasuta | 2016-10-25 |
| 8906808 | Etching method | Ryuichi TAKASHIMA | 2014-12-09 |
| 8790489 | Substrate processing apparatus and substrate processing method | Masanobu Honda, Kazuhiro Kubota, Masaru Nishino | 2014-07-29 |
| 8642478 | Plasma processing method and plasma processing apparatus | Akira Tanabe, Yoshinori Yasuta | 2014-02-04 |
| 8641916 | Plasma etching apparatus, plasma etching method and storage medium | Koichi Yatsuda, Shin Okamoto, Hiromasa Mochiki | 2014-02-04 |
| 8420547 | Plasma processing method | — | 2013-04-16 |
| 8383001 | Plasma etching method, plasma etching apparatus and storage medium | Hiromasa Mochiki, Fumio Yamazaki, Toshio Haga | 2013-02-26 |
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2011-08-02 |