Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478387 | Plasma processing apparatus | Yoshinobu Ooya, Akira Tanabe | 2016-10-25 |
| 8642478 | Plasma processing method and plasma processing apparatus | Yoshinobu Ooya, Akira Tanabe | 2014-02-04 |