Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051570 | Plasma processing apparatus | Maju TOMURA, Ryohei TAKEDA, Yoshinobu Ooya | 2024-07-30 |
| 10410877 | Etching method | Taku Gohira, Yoshinobu Ooya | 2019-09-10 |
| 9922806 | Etching method and plasma processing apparatus | Maju TOMURA, Ryohei TAKEDA, Yoshinobu Ooya | 2018-03-20 |
| 9659789 | Etching method and etching apparatus | Ryohei TAKEDA, Yoshinobu Ooya | 2017-05-23 |
| 8906808 | Etching method | Yoshinobu Ooya | 2014-12-09 |