Issued Patents All Time
Showing 25 most recent of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412728 | Electron beam inspection system | Ryuichi Kusakabe | 2025-09-09 |
| 12222658 | Stage apparatus and electron beam lithography system | Hirofumi Miyao | 2025-02-11 |
| 11080258 | Table generation based on scripts for existing tables | Shinichiro Tago, Shuya Abe, Mitsuru Oda, Masaru Fuji | 2021-08-03 |
| 10948242 | Heat storage reactor | Masaaki Masuda, Yukio Miyairi, Atsuhiro Ichinose | 2021-03-16 |
| 10861678 | Plasma etching apparatus and method | Akira Koshiishi, Shigeru Yoneda, Kenichi Hanawa, Shigeru Tahara, Masaru Sugimoto | 2020-12-08 |
| 10854431 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +11 more | 2020-12-01 |
| 10840750 | Compressor motor and compressor equipped with same | Takahiro Ikeda | 2020-11-17 |
| 10818506 | Etching method and residue removal method | Toshinori Debari | 2020-10-27 |
| 10551589 | Lens drive device, camera module, and camera mounting device | Toshihiko Honma | 2020-02-04 |
| 10546727 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +11 more | 2020-01-28 |
| 10529539 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +10 more | 2020-01-07 |
| 10495844 | Lens drive device, camera module, and camera-mounting device | Yoshiaki Sato, Tomohiko Osaka, Toshihiko Honma | 2019-12-03 |
| 10229815 | Plasma etching apparatus and method | Akira Koshiishi, Shigeru Yoneda, Kenichi Hanawa, Shigeru Tahara, Masaru Sugimoto | 2019-03-12 |
| 10141195 | Substrate processing method | Muneyuki Imai | 2018-11-27 |
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +11 more | 2016-11-08 |
| 9384999 | Plasma etching method and storage medium | Naotsugu Hoshi | 2016-07-05 |
| 9362085 | Charged-particle beam lithographic system | Yoshiaki Takizawa | 2016-06-07 |
| 9130018 | Plasma etching method and storage medium | Naotsugu Hoshi | 2015-09-08 |
| 9057812 | Lens holder driving device capable of easily mounting upper elastic member to outer yoke | Atsushi Okuyama | 2015-06-16 |
| 8961161 | Fluid machine provided with hermetic container that is subjected to pressure of working fluid | Hitomi Ito | 2015-02-24 |
| 8852385 | Plasma etching apparatus and method | Akira Koshiishi, Shigeru Yoneda, Kenichi Hanawa, Shigeru Tahara, Masaru Sugimoto | 2014-10-07 |
| 8843863 | Apparatus, method and computer program for managing circuit optimization information | — | 2014-09-23 |
| 8790490 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +6 more | 2014-07-29 |
| 8603293 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Chishio Koshimizu, Ryuji Ohtani +11 more | 2013-12-10 |
| 8542026 | Apparatus for estimating fuel-cell hydrogen concentration and fuel cell system | Kotaro Ikeda, Toshiaki KUSAKARI, Hideaki Kume, Yoshihiro Ikogi, Hikaru Hasegawa | 2013-09-24 |