Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222658 | Stage apparatus and electron beam lithography system | Noriyuki Kobayashi | 2025-02-11 |
| 7531794 | Method and apparatus for preparing specimen | Tadanori Yoshioka, Kiyoshi Kawatsu | 2009-05-12 |
| 7351970 | Scanning electron microscope | — | 2008-04-01 |
| 6653629 | Specimen inspection instrument | Yukihiro Tanaka, Sadao Matsumoto, Toru Ishimoto | 2003-11-25 |