Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381090 | Etching method and etching apparatus | Reiko SASAHARA, Teppei Okumura, Woonghyun Jeung, Kenshiro ASAHI, Hiroyuki Abe +1 more | 2025-08-05 |
| 10818506 | Etching method and residue removal method | Noriyuki Kobayashi | 2020-10-27 |